Probe
Staion
Probe Station
Fine-tune base
Used on probe stations for precise positioning of the probe.
/ Features
High-precision adjustment, supporting micrometer-level movement
Multi-axis control (X, Y, Z, and θ) via micrometer-driven rotary stages
Front/rear configurations; multiple models available
PSTAM Fine-tune base HPS-PST12301-L RF017/RF020, X-Y-Z axis travel: 12 mm, θ axis travel: 3 degrees
PSTAM Fine-tune base HPS-PST12301-R N/S, X-Y-Z travel: 12 mm, θ travel: 10 degrees
PSTAM Fine-tune base RF003 (RF Probe & Back Side), X-Y-Z travel: 12 mm, θ travel: 10 degrees
DC Fine-tune base HPS-PST06301，HPS-PSTAM-DC002，HTWE-BNC(M)TH#300，HPS-DCTIP05, X-Y-Z axis travel: 12 mm
PSTRF Fine-tune base HPS-PSTRF06301, adjustable X-Y-Z axes, accuracy 2 μm/step
PSTRF Fine-tune base
HPS-PSTRF12321-K110，Adjustable X-Y-Z axis travel: 12 mm, accuracy: 2 μm/step
PSTRF Fine-tune base
HPS-PSTRF421-K110-4X-L-BS，X-Y-Z axis travel: 12 mm, accuracy: 2 μm/step
(Suitable for rear-side measurement)
Microscope Fine-Tune Base HPS-PST30301/RFM004，HPS-OCCD010 1，HPS-OSC010607，HPS-OLENS-RA，HPS-OLED0104，X-Y-Z axis travel: 30 - 30 - 12 mm
Fine-tune base
Used on probe stations for precise positioning of the probe.
/ Features
High-precision adjustment, supporting micrometer-level movement
Multi-axis control (X, Y, Z, and θ) via micrometer-driven rotary stages
Front/rear configurations; multiple models available
Wafer-level probe station
Suitable for chips, wafers, R&D validation, pre-packaging testing, etc.
Double-sided probe station
Suitable for double-sided chips and wafers; can also be used for R&D validation and pre-packaging testing
Modular Probe Station
Highly customizable,
flexible and scalable semiconductor test equipment