Probe Station
Probe Station
A system specifically designed for testing semiconductor wafers and electronic components, widely used in wafer manufacturing, IC design, and other R&D and manufacturing fields related to electronic components.
Designed for precise measurement
/ Probe Station Components: Probe Station Main Unit
Test Platform > Microscope System > Fine-Adjustment Stage
/ Main Unit Control Workstation / Environmental Conditions: Optional Anti-Vibration System
How to Choose the Right Probe Station
3. Manual or motorized adjustment
4. Considerations regarding the type of probe used
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Probe
Staion
Probe Station
A system specifically designed for testing semiconductor wafers and electronic components, widely used in wafer manufacturing, IC design, and other R&D and manufacturing fields related to electronic components.
Designed for precise measurement
/ Components of the Probe Station
Probe Station Main Unit > Test Platform > Microscope System > Fine-Adjustment Stage
/ Main Unit Control Workstation / Environmental Conditions: Optional Anti-Vibration System
How to Choose the Right Probe Station
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02
03
04
Probe Station Main Unit
1. For wafer processing or batch testing, we recommend a wafer probe station.
2. For double-sided electrical testing or power device testing, a double-sided probe station is an option.
3. For testing requirements that vary frequently and require flexible configuration, we recommend a modular probe station.
Testing Platform
1. Dimensions and shape of the test object; number and location of test points
2. Material of the test object and considerations regarding contact with the platform; a non-metallic platform surface may be selected
3. Method of securing the test object to the platform; options include vacuum suction and clamping
4. Environmental conditions; whether electromagnetic interference shielding or a temperature-controlled platform is required
Microscope system
1. Resolution and Magnification Options
2. Required Field of View and Working Distance
3. Illumination Options: Ring Light/Coaxial Light
4. Assessment of Microscope Control Axis Travel
Fine-tuning base
1. Number of axes required (typically X, Y, Z, and Theta)
2. Travel range, accuracy, and resolution
3. Manual or motorized adjustment
4. Considerations regarding the type of probe used
Wafer-level probe station
Suitable for chips, wafers, R&D validation, pre-packaging testing, etc.
Double-sided probe station
Suitable for double-sided chips and wafers; can also be used for R&D validation and pre-packaging testing
Modular Probe Station
Highly customizable,
flexible and scalable semiconductor test equipment