Sized for the user’s wafer/substrate, SemiProbe vacuum probers are used extensively in MEMS development and production. From sensors to gyros, any product that will be vacuum packaged in either a conventional or via 3D package can be characterized earlier in the process. SemiProbe vacuum systems will test wafers or substrates up to 300 mm. Individual die and partial wafers can also be tested. Thermal chuck options are available for temperature ranges from -65o°C to300°C. Different size viewing ports, windows and flanges are available in a variety of materials, as well as several different types of pumps and controls to meet a broad range of vacuum levels. The PS4L interchangeable modules make it easy to convert to provide testing solutions for a number of applications including DC, HF, OPTO, MEMS and more.